Copper etching with cupric chloride and regeneration of waste etchant

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dc.contributor.authorCakir, O
dc.date.accessioned2024-04-24T16:15:09Z
dc.date.available2024-04-24T16:15:09Z
dc.date.issued2006
dc.departmentDicle Üniversitesien_US
dc.description.abstractCopper etching is considerably important process in electronics industry. particularly in the fabrication of printed circuit board. Various etchants can be used for this purpose, but nowadays cupric chloride is more accepted etchant, because of its high etch rate and easy regeneration properties. In the present study, copper etching process with cupric chloride etchant was investigated. In the etching of copper, the most important etching parameter is etch rate, therefore the investigation was based on the various effects on etch rate. The influence of etchant concentration, additives and etching temperature were examined. It is also important to regeneration/recycle of waste etchant from environmental point of view. Thus, various cupric chloride etchant regeneration processes were investigated. (c) 2005 Elsevier B.V. All rights reserved.en_US
dc.identifier.doi10.1016/j.jmatprotec.2005.04.024
dc.identifier.endpage68en_US
dc.identifier.issn0924-0136
dc.identifier.issue1-3en_US
dc.identifier.scopus2-s2.0-33646781592
dc.identifier.scopusqualityQ1
dc.identifier.startpage63en_US
dc.identifier.urihttps://doi.org/10.1016/j.jmatprotec.2005.04.024
dc.identifier.urihttps://hdl.handle.net/11468/15675
dc.identifier.volume175en_US
dc.identifier.wosWOS:000238462300010
dc.identifier.wosqualityQ2
dc.indekslendigikaynakWeb of Science
dc.indekslendigikaynakScopus
dc.language.isoenen_US
dc.publisherElsevier Science Saen_US
dc.relation.ispartofJournal of Materials Processing Technology
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectCopper Etchingen_US
dc.subjectCupric Chlorideen_US
dc.subjectEtch Rateen_US
dc.subjectWaste Regenerationen_US
dc.titleCopper etching with cupric chloride and regeneration of waste etchanten_US
dc.titleCopper etching with cupric chloride and regeneration of waste etchant
dc.typeArticleen_US

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