Review of etchants for copper and its alloys in wet etching processes

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dc.contributor.authorÇakir O.
dc.date.accessioned2024-04-24T18:45:39Z
dc.date.available2024-04-24T18:45:39Z
dc.date.issued2008
dc.departmentDicle Üniversitesien_US
dc.description.abstractWet etching processes have been widely used for producing micro-components for various applications. These processes are simple and easy to implement. The selection of suitable chemical solution which is called etchant is the most important factor in the wet etching processes. It affects etch rate and surface finish quality. Copper and its alloys are important commercial materials in various industries, especially in electronics industry. Their wide applications are due to their excellent electrical and thermal conductivity, ease of fabrication, good strength and fatigue properties. The present study examines the possible etchants for copper and its alloys and reviews studies in detail to find out optimum etchant and its application parameters. The study is also aimed to provide information about safety, health and environmental issues caused by using various etchants in wet etching processes of copper and copper alloys.en_US
dc.identifier.endpage465en_US
dc.identifier.issn1013-9826
dc.identifier.scopus2-s2.0-38849137157
dc.identifier.scopusqualityQ4
dc.identifier.startpage460en_US
dc.identifier.urihttps://hdl.handle.net/11468/24760
dc.identifier.volume364-366 Ien_US
dc.indekslendigikaynakScopus
dc.language.isoenen_US
dc.publisherTrans Tech Publications Ltden_US
dc.relation.ispartofKey Engineering Materials
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectCopperen_US
dc.subjectCopper Alloysen_US
dc.subjectEtchanten_US
dc.subjectWet Etching Processesen_US
dc.titleReview of etchants for copper and its alloys in wet etching processesen_US
dc.titleReview of etchants for copper and its alloys in wet etching processes
dc.typeConference Objecten_US

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